Fluid discharge apparatus and fluid discharge method

ABSTRACT

A positive displacement pump is composed of a first actuator for moving a piston and a housing relatively, a cylinder for accommodating the piston, and a second actuator for moving the cylinder and the housing relatively.

BACKGROUND OF THE INVENTION

[0001] The present invention relates to a fluid discharge apparatus and a fluid discharge method which are capable of feeding fluid at a minute flow rate with high accuracy in every field such as consumer products, information-processing equipment, equipment for factory automation, and production machines.

[0002] With employment of the present invention, a fluid discharge apparatus and a fluid discharge method can be provided which are capable of discharging intermittently or continuously various types of fluid in a constant amount, such as adhesives, solder paste, fluorescent substances, grease, paints, hotmelt, chemicals, and foods, in production processes for such fields as electronic components and household electric appliances.

[0003] Liquid discharging apparatus (dispensers) have been conventionally used in various fields, and techniques for controlling the discharge of a minute amount of fluid material with high accuracy and stably have been demanded with needs for the miniaturization and increased recording density of electronic components in recent years.

[0004] There is also a great demand for a fluid discharging method for applying fluorescent substances uniformly to display surfaces of CRT (Cathode Ray Tube) and PDP (Plasma Display Panel), for example.

[0005] In the field of surface mounting technology (SMT), for example, requests to dispensers in the trends of the speed-up, miniaturization, densification, quality improvement, and automation of mounting are summarized as follows.

[0006] (i) increase in the accuracy in the amount of application

[0007] (ii) reduction in discharging time

[0008] (iii) minimization in the amount of application in one operation

[0009] (iv) diameter reduction in and miniaturization of dispenser body

[0010] (v) equipment with multi-nozzle

[0011] As liquid discharging apparatus, conventionally, such dispensers employing air pulse system as shown in FIG. 21 have been widely used, and this technique is presented, for example, in “Jidoka-gijutsu (Mechanical automation)”, vol. 25, No. 7, '93. A dispenser of this system applies a constant amount of air supplied from a source of a constant pressure into a vessel (cylinder) 150 in pulsed manner and discharges from a nozzle 151 a certain amount of liquid corresponding to a pressure increase in the cylinder 150.

[0012] On the other hand, micropumps employing piezoelectric elements have been developed for the purpose of discharging fluid at a minute flow rate. For example, the following content is presented in “Cho-onpa TECHNO (ultrasonic TECHNO)”, the June issue, '59. FIG. 22 is a figure of the principle of such a micropump and FIG. 23 illustrates its concrete structure. Upon the application of a voltage to a laminated piezoelectric actuator 200, the actuator undergoes a mechanical elongation, which is magnified by the action of a displacement magnifying mechanism 201. Then a diaphragm 203 is pushed upward in the drawing through the medium of a thrust-up rod 202, and the capacity of a pump chamber 204 therefore decreases. At this time, a check valve 206 in a suction opening 205 closes and a check valve 208 in a discharge opening 207 opens and the fluid in the pump chamber 204 is discharged. Upon a reduction in the applied voltage, subsequently, the mechanical elongation decreases with the reduction in the voltage. The diaphragm 203 is then pulled back downward by a coiled spring 209 (by returning action) and the capacity of the pump chamber 204 increases and the pressure in the pump chamber 204 turns negative. The negative pressure opens the check valve 206 in the suction opening and the pump chamber 204 is filled with fluid. At this time, the check valve 208 in the discharge opening remains closed. The coiled spring 209 has an important role of applying a mechanical pre-load to the laminated piezoelectric actuator 200 through the medium of the displacement magnifying mechanism 201, in addition to the action of pulling back the diaphragm 203. After that, the above operations are repeated.

[0013] It is thought that a miniature pump having a minute flow rate with excellent accuracy in flow rate can be obtained with the above configuration using the piezoelectric actuator.

[0014] Among the above-mentioned prior arts, the dispensers of air pulse system had the following issues.

[0015] (1) variation in discharge amount owing to the pulsation of discharge pressure

[0016] (2) variation in discharge amount owing to a water head difference

[0017] (3) change in discharge amount owing to a change in viscosity of liquid

[0018] The shorter cycle time (tact) and the discharge time are, the more remarkable the phenomenon of the above-mentioned first issue makes. Therefore, there have been made such contrivances as the provision of a stabilizer circuit for equalizing the heights of air pulses.

[0019] The above-mentioned second issue occurs for the following reason. The capacity of a cavity 152 in the cylinder varies with a residual quantity H of the liquid and therefore the degree of a change in the pressure in the cavity 152 caused by the discharge of a given amount of high-pressure air varies enormously with the quantity H. As a consequential issue, a decrease in the residual quantity of the liquid reduces the amount of application, e.g., by fifty to sixty percent as compared with the maximum of the amount. Therefore, such remedies have been adopted as the detection of the residual quantity H of the liquid in each discharge operation and the subsequent adjustment of the pulse duration in order to make the discharge amount uniform.

[0020] The above-mentioned third issue occurs in the case that the viscosity of a material, for example, containing a large quantity of solvent changes with time. As an example of remedies which have been adopted for the issue, a tendency of viscosity change with respect to time axis is previously programmed into a computer and, for example, pulse length is adjusted so that the influence of the viscosity change may be corrected.

[0021] Any of the remedies for the above-mentioned issues has not served as a fundamental solution, because the remedies complicate the control system including a computer and have difficulty in accommodating irregular changes in environmental conditions (e.g., temperature).

[0022] The following is a predicted issue in the adaptation of the above-mentioned piezo-pump using the laminated piezoelectric actuator shown in FIGS. 22 and 23 to high-speed intermittent application of high viscosity fluid employed in such fields as surface mounting.

[0023] In the field of surface mounting, dispensers which are capable of applying, e.g., not more than 0.1 mg of adhesive (having a viscosity in the range of one hundred thousand to one million CPS) instantaneously within 0.1 sec. have been demanded in recent years. It is therefore presumed that such a dispenser requires a high hydrostatic pressure in the pump chamber 204 and high responsibility of the suction valve 206 and the discharge valve 208 communicating with the pump chamber 204. For the pump equipped with the passive discharge valve and the passive suction valve, however, it is extremely difficult to intermittently discharge Theological fluid having an extremely poor fluidity and a high viscosity with a high accuracy in flow rate and at a high speed.

[0024] In order to eliminate the above-mentioned defects of the air pulse system, the piezo system employing the laminated piezoelectric actuator and the like, a pump for a minute flow rate that will be described below has been already proposed by the inventor(in Japanese Unexamined Patent Publication No. 10-128217).

[0025] Suction action or discharge action of this pump is obtained by applying a relative linear motion and a relative rotational motion between a piston and a cylinder by means of independent actuators and electrically and synchronously controlling the operations of the actuators.

[0026] In FIG. 24, reference numeral 301 denotes a first actuator composed of a laminated piezoelectric element. Numeral 302 denotes a piston driven by the first actuator 301 and the piston corresponds to a direct-acting part of a pump. Between the piston 302 and a lower housing 303 is formed a pump chamber 304 of which the capacity changes with movements of the piston 302 in its axial direction. In the lower housing 303 are formed a suction bore 305 and discharge bores 306 a and 306 b all of which communicate with the pump chamber 304.

[0027] Numeral 307 denotes a second actuator that causes a relative rotational or rocking motion between the piston 302 and the lower housing 303, and the second actuator is composed of a pulse motor, a DC servo motor, or the like. Numeral 308 denotes a motor rotor constituting the second actuator 307 and numeral 309 denotes a stator.

[0028] A rotating member 310 is connected to the piston 302 through the medium of a leaf spring 311 shaped like a disk. The leaf spring 311 has a shape that easily undergoes elastic deformation in axial direction in order to transmit the expansion and contraction of the piezoelectric element as the first actuator 301 in axial direction to the piston 302. The rotation of the rotating member 310 is transmitted to the piston 302 through the medium of the leaf spring 311. This arrangement permits the piston 302 of the pump to make a rotational motion and a linear motion simultaneously and independently.

[0029] Reference numeral 312 denotes a coupling joint for supplying power from the exterior to the first actuator 301 that makes a rotational motion.

[0030] A discharge sleeve 314 having a discharge nozzle 313 at the tip is installed on a lower end portion of the lower housing 303. On an internal surface of the discharge sleeve 314 is formed a flow passage 315 that provides communications between the discharge bores 306 a, 306 b and the discharge nozzle 313. On surfaces of the lower housing 303 and the piston 302 which undergo the relative movements are formed flow grooves 316 b and 317 b which allow alternate communications between the pump chamber 304 and the suction bore 305 and between the pump chamber 304 and the discharge bores 306 a, 306 b with the relative rotational motion of those two members. These flow grooves play roles of a suction valve and a discharge valve of a conventional pump. Reference numeral 318 denotes a displacement sensor and numeral 319 denotes a rotating disk fixed to the piston 302. A position of the piston 302 in the axial direction is detected by the displacement sensor 318 and the rotating disk 319.

[0031] It is thought that, among the requests to dispensers mentioned at the beginning herein, (i) increase in the accuracy in the amount of application, (ii) reduction in discharging time, and (iii) minimization in the amount of application in one operation can be achieved by the above-mentioned dispenser shown in FIG. 24, because the dispenser is a positive displacement pump composed of a combination of reciprocating piston and cylinder.

[0032] It is, however, difficult for the dispenser to meet the remainder of the requests, i.e., (iv) diameter reduction in and miniaturization of dispenser body and (v) equipment with multi-nozzle.

[0033] In the above-mentioned dispenser shown in FIG. 24, the piezoelectric actuator is used for the linear motion and the motor is used for the rotational motion.

[0034] Besides, power for the conversion of electric energy into mechanical energy is required to be applied to an electrode of the rotating piezoelectric element through the medium of conductive brush (the coupling joint).

[0035] The above arrangement also requires a bearing and the displacement sensor to be provided in an area surrounding a rotational axis and thus has a limit to the accommodation to the requests of diameter reduction in dispenser (and equipment with multi-nozzle).

[0036] The present invention has been contrived, taking notice of the fact that a positive displacement pump, for example, can be constituted by the combination of two independent linear-motion devices in consideration of phases of those motions. An object of the present invention is to provide a fluid discharge apparatus and method which can apply, for example, a minute amount of powder and granular material having an extremely high viscosity at a super high speed and with high accuracy, and can realize substantial diameter reduction in and miniaturization of a dispenser body and simplification of the arrangement.

SUMMARY OF THE INVENTION

[0037] In accomplishing these and other aspects, according to an aspect of the present invention, there is provided a fluid discharge apparatus: comprises a first actuator for moving a piston and a housing relatively; a cylinder which accommodates at least a part of the piston and has a space extending therethrough in an axial direction thereof; a second actuator for moving the cylinder and the housing relatively; a pump chamber defined by the piston, the cylinder, and the housing; and a fluid suction opening and a fluid discharge opening which provide communications between the pump chamber and outside thereof.

[0038] That is, according to a first aspect of the present invention, there is provided a fluid discharge apparatus comprising:

[0039] a first actuator for moving a piston and a housing relatively;

[0040] a cylinder which accommodates at least a part of the piston and has a space extending therethrough in an axial direction thereof; and

[0041] a second actuator for moving the cylinder and the housing relatively, wherein a pump chamber is defined by the piston, the cylinder, and the housing, and a fluid suction opening and a fluid discharge opening are provided for communications between the pump chamber and outside thereof.

[0042] According to a second aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein the first actuator is installed on a fixing section and moves in an axial direction and the second actuator is installed on an opposite surface of the fixing section and moves in the same axial direction as the first actuator moves.

[0043] According to a third aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein a side of the piston facing the pump chamber has an open end and a discharge opening is formed on a surface which undergoes relative movements between an end surface of the piston facing the pump chamber and a surface facing the end surface.

[0044] According to a fourth aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein the pump chamber has a capacity changing with the relative movements between the piston and the housing.

[0045] According to a fifth aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein the cylinder and the housing are configured so that a flow passage resistance of fluid traveling between the pump chamber and the outside changes with relative movements between the cylinder and the housing.

[0046] According to a sixth aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein an end section of the piston facing the pump chamber and an internal surface section of the cylinder accommodating the end section of the piston have reduced diameters and are attachable and detachable.

[0047] According to a seventh aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein the first actuator and/or the second actuator are actuators of electro-magneto-strictive type.

[0048] According to an eighth aspect of the present invention, there is provided a fluid discharge apparatus as defined in the seventh aspect, wherein the actuator of electro-magneto-strictive type comprises a piezoelectric element or a giant magnetostrictive element.

[0049] According to a ninth aspect of the present invention, there is provided a fluid discharge apparatus as defined in the eighth aspect, wherein the element of electro-magneto-strictive type and a control circuit for the element have both functions of an actuator and of a displacement sensor.

[0050] According to a 10th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein relative axial positions of the piston and of the housing are controlled on the basis of output from a displacement sensor for detecting the relative axial positions.

[0051] According to an 11th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein a displacement sensor comprising a hollow rotor for position detection and a stator for position detection is used for detecting relative axial positions of the cylinder and of the housing.

[0052] According to a 12th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the 11th aspect, wherein the displacement sensor is of differential transformer type.

[0053] According to a 13th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein an axial length of the first actuator is larger than an axial length of the second actuator.

[0054] According to a 14th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the 13th aspect, wherein the first actuator comprises a plurality of actuators arranged along the axial direction.

[0055] According to a 15th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, having a hybrid actuator structure in which a giant magnetostrictive element is employed for any one of the first actuator and the second actuator and a piezoelectric element is employed for the other.

[0056] According to a 16th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein a linear motor or linear motors are employed for any one or both of the first actuator and the second actuator.

[0057] According to a 17th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, having a linear motor comprising a rod in which radially magnetized cylindrical or solid permanent magnets are laminated and an electromagnetic coil which surrounds an outer circumference of the rod.

[0058] According to an 18th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein the piston has a shape of a thin plate and a rectangular cross section.

[0059] According to a 19th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein the first actuator and/or the second actuator are laminated piezoelectric elements each having a rectangular cross section.

[0060] According to a 20th aspect of the present invention, there is provided a fluid discharge system comprising: an enclosure section which accommodates a plurality of fluid discharge apparatus as defined in the first aspect; and a fluid feeder for feeding the enclosure section with fluid.

[0061] According to a 21st aspect of the present invention, there is provided a fluid discharge system as defined in the 20th aspect, wherein the enclosure section is configured so that a common fluid feeding passage communicates with a plurality of pump chambers of the plurality of fluid discharge apparatus.

[0062] According to a 22nd aspect of the present invention, there is provided a fluid discharge system as defined in the 20th aspect, wherein giant magnetostrictive elements from which permanent magnets are omitted are employed for the first actuator and/or the second actuator and a common cooling passage for cooling magnetic field coils is formed in the enclosure section.

[0063] According to a 23rd aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein at least one of the first actuator and the second actuator comprise a thin-film piezo element.

[0064] According to a 24th aspect of the present invention, there is provided a fluid discharge apparatus wherein at least one of a first actuator and a second actuator has a function of traveling or expanding and contracting with aid of exterior, electromagnetic and non-contact power supplying device.

[0065] According to a 25th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, comprising a third actuator for producing relative rotation between the cylinder and the housing and a pump device for feeding fluid forcefully to a discharge side which is formed on a surface that undergoes relative movements between the cylinder and the housing.

[0066] According to a 26th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the 25th aspect, wherein the pump device is thread groove pump.

[0067] According to a 27th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the 25th aspect, wherein the first actuator is a giant magnetostrictive element.

[0068] According to a 28th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein the cylinder and the piston are driven in generally opposite phases.

[0069] According to a 29th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein both end portions of one actuator that expands and contracts axially are supported by springs, output of one end of the actuator is used as the first actuator and output of the other end of the actuator is used as the second actuator.

[0070] According to a 30th aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein a high-pressure developing source for fluid is provided on an upstream side of the fluid discharge apparatus and the cylinder and the piston in the fluid discharge apparatus as a fluid control valve are driven in generally opposite phases so as to release or shut off the fluid.

[0071] According to a 31st aspect of the present invention, there is provided a fluid discharge method comprising:

[0072] producing by a first and a second actuators relative movements between a piston and a housing and between a cylinder and the housing, respectively, to open a pump chamber defined by the piston, the cylinder, and the housing, thereby sucking fluid into the pump chamber;

[0073] thereafter blocking the pump chamber and a passage on a suction side by driving the second actuator; and

[0074] thereafter compressing the fluid in the pump chamber by driving the first actuator and the fluid and thereby discharging the fluid into outside.

[0075] According to a 32nd aspect of the present invention, there is provided a fluid discharge method as defined in the 31st aspect, wherein in producing by the first and the second actuators the relative movements, the first actuator moves in an axial direction and the second actuator moves in the same axial direction as the first actuator moves.

[0076] According to a 33rd aspect of the present invention, there is provided a fluid discharge method as defined in the 31st aspect, wherein in producing by the first and the second actuators the relative movements, a capacity of the pump chamber is changed with the relative movements between the piston and the housing.

[0077] According to a 34th aspect of the present invention, there is provided a fluid discharge method as defined in the 31st aspect, wherein in producing by the first and the second actuators the relative movements, relative rotation between the cylinder and the housing is produced to feed the fluid forcefully to a discharge side formed on a surface that undergoes the relative movements between the cylinder and the housing.

[0078] According to a 35th aspect of the present invention, there is provided a fluid discharge method as defined in the 31st aspect, wherein the relative movements are produced by the first and the second actuators by axially expanding and contracting both end portions of one actuator supported by springs to use as the first actuator output of one end of the actuator and use as the second actuator output of the other end of the actuator.

[0079] According to a 36th aspect of the present invention, there is provided a fluid discharge method as defined in the 31st aspect, wherein the cylinder and the piston as a fluid control valve are driven in generally opposite phases so as to cancel a change in a capacity of the pump chamber to release or shut off the fluid.

[0080] According to a 37th aspect of the present invention, there is provided a fluid discharge method as defined in the 31st aspect, wherein in producing by the first and the second actuators the relative movements between the piston and the housing and between the cylinder and the housing, respectively, the fluid that is red fluorescent material is sucked into the pump chamber;

[0081] after blocking the pump chamber and the passage on the suction side by driving the second actuator, in compressing the fluid in the pump chamber by driving the first actuator and the fluid, thereby the fluid is lineally discharged into outside to apply the fluid on a panel of a CRT;

[0082] then in producing again by the first and the second actuators the relative movements between the piston and the housing and between the cylinder and the housing, respectively, the fluid that is green fluorescent material is sucked into the pump chamber;

[0083] after blocking the pump chamber and the passage on the suction side by driving the second actuator, in compressing the fluid in the pump chamber by driving the first actuator and the fluid, thereby the fluid is lineally discharged into outside to apply the fluid on the panel of the CRT;

[0084] then in producing again by the first and the second actuators the relative movements between the piston and the housing and between the cylinder and the housing, respectively, the fluid that is blue fluorescent material is sucked into the pump chamber; and

[0085] after blocking the pump chamber and the passage on the suction side by driving the second actuator, in compressing the fluid in the pump chamber by driving the first actuator and the fluid, thereby the fluid is lineally discharged into outside to apply the fluid on the panel of the CRT.

[0086] According to a 38th aspect of the present invention, there is provided a fluid discharge method as defined in the 31st aspect, wherein the fluid is fluorescent material or electrode material.

[0087] According to a 39th aspect of the present invention, there is provided a fluid discharge method as defined in the 31st aspect, wherein the fluid is fluorescent material in a case where the fluid is discharged onto a CRT.

[0088] According to a 40th aspect of the present invention, there is provided a fluid discharge method as defined in the 31st aspect, wherein the fluid is electrode material in a case where the fluid is discharged onto a PDP.

[0089] According to a 41st aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein the fluid is fluorescent material or electrode material.

[0090] According to a 42nd aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein the fluid is fluorescent material in a case where the fluid is discharged onto a CRT.

[0091] According to a 43rd aspect of the present invention, there is provided a fluid discharge apparatus as defined in the first aspect, wherein the fluid is electrode material in a case where the fluid is discharged onto a PDP.

BRIEF DESCRIPTION OF THE DRAWINGS

[0092] These and other aspects and features of the present invention will become clear from the following description taken in conjunction with the preferred embodiments thereof with reference to the accompanying drawings, in which:

[0093]FIG. 1 is a model diagram illustrating principles of the present invention;

[0094]FIGS. 2A, 2B, 2C, 2D, 2E, and 2F are model diagrams illustrating suction and discharge strokes in a first embodiment of the present invention;

[0095]FIG. 3 is a graph illustrating displacements of a piston and of a movable sleeve;

[0096]FIG. 4 is a cross-sectional front view illustrating a dispenser of a first embodiment of the present invention;

[0097]FIG. 5 is a cross-sectional front view illustrating a dispenser of a second embodiment of the present invention;

[0098]FIG. 6 is a model diagram of a third embodiment of the present invention;

[0099]FIGS. 7A, 7B, and 7C are model diagrams illustrating a discharge stroke in the third embodiment;

[0100]FIG. 8 is a cross-sectional front view illustrating a dispenser of the third embodiment of the present invention;

[0101]FIG. 9 is a cross-sectional front view illustrating a dispenser of a fourth embodiment of the present invention;

[0102]FIG. 10 is a cross-sectional front view illustrating a dispenser of a fifth embodiment of the present invention;

[0103]FIG. 11 is a cross-sectional front view illustrating a dispenser of a sixth embodiment of the present invention;

[0104]FIG. 12 is a cross-sectional front view illustrating a dispenser of a seventh embodiment of the present invention;

[0105]FIGS. 13A and 13B are a perspective view and a plane view illustrating a multi-nozzle dispenser having a rectangular cross section of an eighth embodiment of the present invention;

[0106]FIG. 14 is a cross-sectional front view of a microminiature dispenser employing piezoelectric elements of bimorph type according to a ninth embodiment of the present invention;

[0107]FIG. 15 is a cross-sectional front view of a dispenser with a thread groove pump according to a tenth embodiment of the present invention;

[0108]FIGS. 16A and 16B are model diagrams of a dispenser with thrust dynamic pressure seal according to an eleventh embodiment of the present invention;

[0109]FIG. 17A is a graph illustrating displacements of a piston with respect to time and

[0110]FIG. 17B is a model diagram of a conventional flow control valve;

[0111]FIG. 18A is a graph illustrating displacements of a piston with respect to time and

[0112]FIG. 18B is a model diagram of a flow control valve according to a twelfth embodiment to which the present invention is adapted;

[0113]FIG. 19 is a graph comparing a pressure characteristic on an upstream side of a discharge nozzle in the conventional flow control valve with that in the flow control valve to which the present invention is adapted;

[0114]FIG. 20 is a cross-sectional front view of a flow control valve according to a thirteenth embodiment of the present invention;

[0115]FIG. 21 is a view illustrating a conventional dispenser employing air pulse system;

[0116]FIG. 22 is a figure of principles of a conventional piezo-pump;

[0117]FIG. 23 is a cross-sectional front view of the conventional piezo-pump of FIG. 22;

[0118]FIG. 24 is a cross-sectional view of a conventional pump for a minute flow rate;

[0119]FIG. 25 is a perspective view of the dispenser of the seventh embodiment including one thread groove pump and fifteen microminiature dispensers which is used for application of a display such as a CRT or a PDP; and

[0120]FIG. 26 is a graph showing a relation (an analyzed result of transient characteristics of discharge flow rate) between flow rate and time in cases where the displacements Xp are 10, 20, and 30 μm while Xs is 20 μm (constant) and where sleeve radius rs is 3 mm, piston radius rp is 1.5 mm, fluid viscosity η is 10,000 CPS.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0121] Before the description of the present invention proceeds, it is to be noted that like parts are designated by like reference numerals throughout the accompanying drawings.

[0122] (Description of Principles of the Present Invention)

[0123] Prior to a detailed description of a first embodiment of the present invention, principles of driving in an adaptation of the present invention to a positive displacement pump will be described with reference to FIGS. 1 to 3.

[0124] Reference numeral 1 denotes an upper actuator (one example of a first actuator), numeral 2 denotes a lower actuator (one example of a second actuator), numeral 3 denotes a movable sleeve (one example of a cylinder) fixed to a free end side of the lower actuator 2, and numeral 4 denotes a piston fixed to a free end side 5 of the upper actuator 1. Numeral 16 denotes a section to which the actuators 1 and 2 are fixed.

[0125] The piston 4 is housed so as to pierce center regions of the upper and lower actuators 1 and 2 and so as to be movable in an axial direction. Numeral 6 denotes a housing provided on fixed side in an area surrounding the movable sleeve, numeral 7 denotes a discharge nozzle formed in a center region of the housing, and numeral 8 denotes an opening of the discharge nozzle formed on a surface facing an end surface 9 of the piston 4. Numeral 10 denotes a displacement sensor A provided on a top end portion of the piston 4 and the sensor detects an absolute position Xp of the piston 4 with respect to the fixed side. Numeral 11 denotes a displacement sensor B that detects an absolute position Xs of the movable sleeve 3. Numeral 12 denotes a pump chamber defined by the piston 4, the movable sleeve 3, and the housing 6. Numeral 14 denotes a storing chamber for fluid 13.

[0126] The upper and lower actuators 1 and 2 are driven independently by driving sources (not shown) provided outside, on the basis of output from the displacement sensors 10 and 11.

[0127] Hereinbelow, an example of suction and discharge strokes of the pump will be described with reference to FIGS. 2A-2C.

[0128] 1. Suction Stroke (FIGS. 2A to 2C through 2B)

[0129] (1) Situation of FIG. 2A

[0130]FIG. 2A illustrates a situation in which both the piston 4 and the movable sleeve 3 stand still. The piston 4 has descended to its lowest position so that its end surface 9 covers the opening 8 of the discharge nozzle 7. The gap between the end surface 9 of the piston 4 and the facing surface thereof is narrow enough to restrain the fluid 13 from flowing out into the discharge nozzle 7. The movable sleeve 3 has similarly descended to its lowest position as the lower actuator 2 has extended.

[0131] (2) Situation of FIG. 2B

[0132] In FIG. 2B, contraction of the lower actuator 2 as shown by arrows causes the movable sleeve 3 to ascend while the piston 4 stands still. In this stage, the piston 4 is still in its lowest position and has been sealing the opening 8 of the discharge nozzle 7.

[0133] (3) Situation of FIG. 2C

[0134] Having ascended to a position in the situation (2), the movable sleeve 3 suddenly changes direction and starts to descend. In this stage, the piston 4 starts to ascend.

[0135] The ascent of the piston 4 creates a new space in the pump chamber 12, while the descent of the movable sleeve 3 displaces the fluid 13 into the pump chamber 12 and into the fluid storing chamber 14 as shown by arrows in the drawing. An ascending speed Sp of the piston 4 and a descending speed Ss of the movable sleeve 3 are established according to cross-sectional areas of respective members.

[0136] For example, the speeds Sp and Ss are established so that the amount of change in the total volume (V=Vp+Vs) with the lapse of time becomes zero, wherein Vs is a volume displaced by the descent of the movable sleeve 3 and Vp is a volume of the space created newly by the ascent of the piston 4.

[0137] Where the amount of change in the total volume V with the lapse of time is small, the absolute value of the pressure in the pump chamber 12 can be held within a given range so that a large difference in pressure from the discharge side (atmospheric pressure) may not occur. As a result, the inflow and outflow of the fluid between the pump chamber 12 and the discharge side through the discharge nozzle 7 can be restricted within an allowable range during the suction stroke in FIG. 2C.

[0138] Upon the arrival at the lowest position of the end surface of the movable sleeve 3 having descended, the piston 4 reaches a top dead center. The suction stroke is completed at this point.

[0139] The above suction stroke is summarized as follows. In the situations of FIGS. 2A and 2B, the outflow of the fluid 13 from the fluid storing chamber 14 to the side of the discharge nozzle 7 is prevented, because the opening 8 of the discharge nozzle 7 is being covered and sealed with the end surface 9 of the piston.

[0140] In the situation of FIG. 2C, the pressure in the pump chamber 12 tends to be negative, for example, provided the ascending speed Sp of the piston 4 and the descending speed Ss of the movable sleeve 3 are established so that the amount of change in the total volume (V=Vp+Vs) with the lapse of time becomes a small minus. As a result, the outflow of the fluid 13 to the side of the discharge nozzle 7 can be completely prevented.

[0141] 2. Discharge Stroke (FIGS. 2D to 2E)

[0142] (4) Situation of FIG. 2D

[0143]FIG. 2D illustrates a situation at the instant following the commencement of the discharge stroke (at the instant of the completion of the suction stroke). At this point, the end surface 9 of the piston 4 is in a position having a height H (Xp=H). The height has been predetermined on the basis of a target amount of discharge.

[0144] At the instant of the commencement of the discharge stroke, the end surface of the movable sleeve 3 and the facing surface thereof are in absolute contact with each other or have a gap that is narrow enough, so that the pump chamber 12 is being a closed space cut off from the outside.

[0145] (5) Situation of FIG. 2E

[0146] Then lowering the piston 4 as shown by arrows in FIG. 2E causes the pressure of the fluid in the pump chamber 12 to increase, and the fluid is thereby discharged to the outside through the discharge nozzle 7.

[0147] The degree of the increase in the pressure of the fluid is determined by the size and shape of the discharge nozzle 7, the viscosity of the fluid, the compressibility (modulus of elasticity of volume) of the fluid, the speed of the piston 4, and the like.

[0148] The total discharge amount of the pump is, however, hardly influenced by those parameters and is determined chiefly by a travel of the piston 4 alone, because the pump functions as a complete positive displacement pump in the discharge stroke.

[0149] (6) Situation of FIG. 2F

[0150] On the arrival at a bottom dead center of the end surface 9 of the piston 4 having descended, the fluid 13 in the pump chamber 12 has been evacuated to the outside and the discharge stroke is completed (from then on, the operation returns to the above situation of FIG. 2A).

[0151] Where the fluid discharge apparatus of the embodiment of the present invention is used as a pump for a minute flow rate, the employment of electro-magneto-strictive actuators such as piezoelectric elements or giant magnetostrictive elements as the upper and lower actuators 1 and 2 causes a preferable effect of a high responsibility not less than a few megahertz.

[0152] For discharging highly viscous fluid at a high speed, the upper and lower actuators 1, 2 are required to have a great thrust resisting a high fluid pressure. In this case, electro-magneto-strictive actuators capable of easily outputting a force of hundreds to thousands of newtons are advantageous.

[0153] Besides, to perform feedback control with position detection would ensure a high positioning accuracy not more than 1 μm. Herein, piezoelectric elements and giant magnetostrictive elements are referred to as electro-magneto-strictive elements.

[0154] In a pump working with a minute flow rate as will be shown in preferred embodiments, the quantity of the displacements of the piston in the axial direction may be minute, i.e., in the range from a few micrometers to tens of micrometers. With this advantage of a minute displacement, a limitation on stroke in piezoelectric elements and giant magnetostrictive elements offers no problem.

[0155] Where piezoelectric elements or giant magnetostrictive elements are employed as the upper and lower actuators 1, 2, the stroke control over the piston 4 and the movable sleeve 3 can be performed even with open-loop control without displacement sensor, because an input voltage (or an input current in the case of giant magnetostrictive element) to the element and the displacement of the element are directly proportional. Nevertheless, to perform feedback control with such a position detecting device as used in the embodiment ensures the flow rate control with higher accuracy.

[0156] A displacement Xp of the piston 4 in FIG. 1 (the accuracy in the height H in FIG. 2D) directly exerts an influence upon the accuracy in the total discharge amount of the dispenser, while a small error in the position accuracy of the movable sleeve 3 is allowable in many instances because the main role of the movable sleeve 3 is to seal off the pump chamber 12 from the outside. Accordingly, feedback control with position detection with use of a displacement sensor may be applied only to the piston 4, while open-loop control without displacement sensor may be applied to the movable sleeve 3. In this case, the start timing of the movement of the movable sleeve 3 may be based on output from the displacement sensor for the piston 4.

[0157] Where the present invention is adapted to a dispenser and a positive displacement pump as the embodiment is thereby configured, some functions which cannot be fulfilled by conventional air pulse type and thread groove type can be achieved. For example, a small amount of ascent of the piston in a situation immediately following the completion of the discharge in FIG. 2F would generate a negative pressure in the pump chamber 12 and would thereby prevent fluid dripping (not shown).

[0158] The generation of an impactive load by the electro-magneto-strictive actuator having a high response could cause discharged fluid to fly with a large momentum, because the dispenser is tightly sealed except a passage on the side of the discharge nozzle (not shown).

[0159] In this embodiment, the housing is fixed, and the actuators are arranged so as to produce relative motions between the piston and the housing and between the cylinder and the housing.

[0160] For this arrangement, an arrangement may be substituted in which, for example, the piston is fixed and the housing is driven by the first actuator (not shown).

[0161] Otherwise, an arrangement may be substituted in which the movable sleeve (the cylinder) is fixed and the housing is driven by the second actuator (not shown).

[0162] One example of the suction and discharge strokes in the adaptation of the present invention to a dispenser has been described above. FIG. 3 illustrates the relations between the displacements of the movable sleeve 3 and of the piston 4 and each step (A to F, that is, FIG. 2A to FIG. 2F) in this example. In FIG. 3, reference character Xp denotes displacements of the piston 4 and reference character Xs denotes displacements of the movable sleeve 3.

[0163] Hereinbelow, more specified embodiments of the present invention will be described.

[0164]FIG. 4 illustrates a first embodiment in which the present invention is adapted to a dispenser for surface-mounting of electronic components. Reference numeral 101 denotes an upper actuator (one example of a first actuator) and numeral 102 denotes a lower actuator (one example of a second actuator).

[0165] In the embodiment, cylindrical piezoelectric elements which ensure a high positioning accuracy, have a high responsibility, and provide a large developed load are employed as the actuators 101 and 102, for the intermittent discharge of a minute amount of highly viscous fluid at a high speed and with a high accuracy.

[0166] Reference numeral 103 denotes a movable sleeve (one example of a cylinder) fixed to a free end side of the lower actuator 102, and numeral 104 denotes a piston fixed to a free end side 105 of the upper actuator 101, and the piston corresponds to a direct-acting part of a reciprocating pump (a direct-acting pump).

[0167] Numeral 106 denotes an upper housing that accommodates the actuators 101 and 102, and numeral 107 denotes a fixing section for piezoelectric elements that constitute the actuators 101 and 102.

[0168] The piston 104 is accommodated so as to pierce center regions of the upper and lower actuators 101 and 102 and so as to be movable in an axial direction.

[0169] Numeral 108 denotes a lower housing provided on fixed side in an area surrounding the movable sleeve 103 and fastened to the upper housing 106. Numeral 109 denotes a contact seal installed between the movable sleeve 103 and the lower housing 108, and numeral 110 denotes a suction opening.

[0170] Numeral 111 denotes a bias spring for applying an axial bias load to the lower actuator (piezoelectric element) 102 and the bias spring 111 is installed between the movable sleeve 103 and the lower housing 108.

[0171] Numeral 112 denotes a lower plate fixed to the lower housing 108, and numeral 113 denotes an orifice of a discharge opening formed at a center region of the lower plate 112 and on a surface facing an end surface 114 of the piston 104. Numeral 115 denotes a discharge nozzle fastened to the lower plate 112.

[0172] Numeral 116 denotes a fluid storing section utilizing a space defined by the movable sleeve 103 and the lower housing 108 and communicating with an exterior fluid feeder (not shown) through the suction opening 110. Numeral 117 denotes a pump chamber that is a space defined by the movable sleeve 103, the piston 104, and the lower plate 112.

[0173] Numeral 118 denotes a non-contact seal section where a clearance between the movable sleeve 103 and the piston 104 is arranged so as to be as small as possible. Numeral 119 denotes a void between the piston 104 and the first and second actuators 101, 102.

[0174] Numeral 120 denotes a displacement sensor provided on a top end side of the piston 104 and fixed to an upper plate 121, and the displacement sensor 120 detects an absolute position of the piston 104 with respect to the fixed side.

[0175] In the embodiment, a displacement sensor for detecting a position of the movable sleeve 103 in an axial direction is omitted.

[0176] Numeral 123 denotes a bias spring for applying an axial bias load to the upper actuator (piezoelectric element) 101 and the spring 123 is installed between the piston 104 and the upper plate 121. The bias springs 111 and 123 continuously exert axial compressive stresses on the electro-magneto-strictive element and thereby cancel a defect of the electro-magneto-strictive element, i.e., the vulnerability to tensile stress in the case that repeated stress is generated.

[0177] In the above embodiment, the two independent linear-motion device (actuators), the displacement sensor, and the discharge nozzle are disposed coaxially in series.

[0178] In addition, the positive displacement pump is configured with the pierced center regions of the two linear-motion device and with the synchronized operation in consideration of phases of the motions. As a result, the positive displacement pump having an extremely small diameter and a simple configuration can be obtained as is apparent from the drawing of the configuration of the embodiment.

[0179]FIG. 5 illustrates a second embodiment in which a fluid discharge apparatus of the present invention is adapted to a dispenser and in which a displacement sensor for a movable sleeve is also provided for a further increase in an accuracy in discharge flow rate.

[0180] Reference numeral 501 denotes an upper actuator, numeral 502 denotes a lower actuator, numeral 503 denotes a movable sleeve fixed to a free end side of the lower actuator 502, numeral 504 denotes a piston fixed to a free end side 505 of the upper actuator 501, and numeral 506 denotes a small-diameter portion of the piston 504.

[0181] Numeral 507 denotes an upper housing that accommodates the actuators 501 and 502, and numeral 508 denotes a fixing section for piezoelectric elements that constitute the actuators 501 and 502.

[0182] Numeral 509 denotes a lower housing fastened to the upper housing 507. Numeral 510 denotes a contact seal installed between the movable sleeve 503 and the lower housing 509, and numeral 511 denotes a suction opening.

[0183] Numeral 512 denotes a bias spring for applying an axial bias load to the lower actuator 502 and the spring 512 is installed between the movable sleeve 503 and the upper housing 507.

[0184] Numeral 513 denotes a lower plate fixed to the lower housing 509, and numeral 514 denotes an orifice of a discharge opening formed at a center region of the lower plate 513 and on a surface facing an end surface 515 of the small-diameter portion 506 of the piston 513. Numeral 516 denotes a discharge nozzle fastened to the lower plate 513.

[0185] Numeral 517 denotes a fluid storing section utilizing a space defined by the movable sleeve 503 and the lower housing 509 and communicating with an exterior fluid feeder (not shown) through the suction opening 511. Numeral 518 denotes a piston chamber that is a space defined by the movable sleeve 503, the small-diameter portion 506 of the piston 504, and the lower plate 513.

[0186] Numeral 519 denotes a piston displacement sensor provided on a top end side of the piston 504 and fixed to an upper plate 520, and the sensor 519 detects an absolute position of the piston 504 with respect to the fixed side. Numeral 521 denotes a stator unit of a displacement sensor of differential transformer type fixed to an inner surface of the upper housing 507, and numeral 522 denotes a rotor unit fixed to the movable sleeve 503 side.

[0187] The differential transformer is of type used for electric micrometers and detects a position of the movable sleeve 503 in axial direction.

[0188] Numeral 523 denotes a bias spring for applying an axial bias load to the upper actuator (piezoelectric element) 501 and the spring 523 is installed between the piston 504 and the upper plate 520.

[0189] In the embodiment, a position of the movable sleeve 503 in axial direction can be detected with precision by the displacement sensor 519 of differential transformer type. This arrangement ensures the control with a precise adjustment between operation timings of the two actuators 501 and 502 and the strict control over the displacements and speeds of both the actuators 501 and 502. As a result, the accuracy in discharge flow rate can be increased.

[0190] Besides, the whole dispenser can be configured so as to ensure small diameters of the cylindrical housings 507 and 509, with use of the displacement sensor composed of the hollow detecting rotor 522 and the detecting stator 521 for the position detection of the movable sleeve 503 as shown in the embodiment.

[0191] The embodiment has a configuration in which the two actuators, the two sensors, the piston, and the discharge nozzle are disposed axially and axisymmetrically. For example, outside diameters of giant magnetostrictive elements and piezoelectric elements can be decreased to not greater than several millimeters as well known.

[0192] The present invention therefore provides a microminiature positive displacement dispenser of “pencil size” that is capable of applying highly viscous fluid with precision.

[0193] Hereinbelow, a third embodiment in which the present invention is adapted to a dispenser will be described.

[0194] The third embodiment shows an example in which not an end surface but a side surface of a movable sleeve is used for sealing a pump chamber with the movable sleeve.

[0195] In the first place, principles of the present invention will be described with reference to model diagrams of FIGS. 6 and 7.

[0196] Reference numeral 601 denotes an upper actuator, numeral 602 denotes a lower actuator, numeral 603 denotes a movable sleeve fixed to a free end side of the lower actuator 602, numeral 604 denotes a piston, numeral 605 denotes a housing, numeral 606 denotes a discharge nozzle, numeral 607 denotes a displacement sensor, numeral 608 denotes a pump chamber defined by the piston 604, the movable sleeve 603, and the housing 605, numeral 609 denotes a storing chamber for fluid 610, and numeral 611 denotes a small-diameter portion of the housing 605.

[0197]FIG. 6 illustrates a situation in which a narrow gap δ is held between a side surface of the movable sleeve 603 and the small-diameter portion 611 of the housing 605 so that the pump chamber 608 is isolated from outside (from the fluid storing chamber 609).

[0198] Hereinbelow, outlines from a situation just before the completion of a suction stroke of the pump to the completion of a discharge stroke will be illustrated with reference to FIGS. 7A-7C.

[0199] (1) Situation of FIG. 7A

[0200]FIG. 7A illustrates a situation just before the completion of the suction stroke. In this situation, the pump chamber 608 has been already filled fully with fluid.

[0201] The fluid storing chamber 609 and the pump chamber 608 communicate with each other through a clearance (having a size h1) between a top end surface 612 of the small-diameter portion 611 of the housing 605 and a bottom end surface 613 of the movable sleeve 603.

[0202] (2) Situation of FIG. 7B

[0203] The movable sleeve 603 is lowered by a small amount (a size h2) from the state of FIG. 7A. As a result, the bottom end surface 613 of the movable sleeve 603 moves to a position lower than the top end surface 612 of the small-diameter portion 611 of the housing 605. The gap between the side surface of the movable sleeve 603 and the small-diameter portion 611 has been set small enough, so that the passage for fluid 610 between the fluid storing chamber 609 and the pump chamber 608 is cut off in this stage.

[0204] In the transportation of compressible fluid, an increase in the compression in the pump chamber 608 is small in the majority of cases, because the travel of the movable sleeve 603 may be as small as the size h2.

[0205] For minimizing the compression increase to restrain fluid from leaking out into the discharge side, the piston 604 has only to be raised by an amount corresponding to a volume that is equivalent to or larger than a volume displaced by the movable sleeve 603.

[0206] The piston 604 is subsequently lowered from a position having a height Hi while the movable sleeve 603 stands still. The fluid 610 is then discharged into the atmosphere side through the discharge nozzle 606, because the pump chamber 608 has formed a closed space except for a passage on the discharge side.

[0207] (3) Situation of FIG. 7C

[0208] Upon the arrival of the piston 604 at a bottom dead center (having a height H2), the discharge stroke is completed. A stroke (H1-H2) of the piston 604 is determined by a target value of total amount of discharge flow.

[0209] Raising the piston 604 by a small amount after the completion of the discharge causes the pressure in the pump chamber 608 to tend to be negative and thus the fluid 610 remaining inside the discharge nozzle 606 can be brought back into the pump chamber 608. As a result, any fluid body which adheres to the tip of the discharge nozzle 606 normally with surface tension is eliminated, and thread-forming, fluid dripping, and the like can be prevented (not shown).

[0210] In the suction stroke in the embodiment, the inflow and outflow of fluid between the pump chamber 608 and the discharge nozzle 606 are apprehended. It is noted, however, that a pressure to be developed in the pump chamber 608 can be set sufficiently large because the pump to which the present invention is adapted is of positive displacement type. Provided that the pressure to be developed can be set sufficiently large, the fluid resistance of the discharge nozzle 606 can be set sufficiently large. That is, the diameter of the discharge nozzle can be set smaller and the length of the nozzle 606 can be set larger.

[0211] As a result, the leakage or back flow between the pump chamber 608 and the discharge nozzle 606 in the suction stroke can be restricted within a range that is almost negligible in practice.

[0212]FIG. 8 illustrates a specific configuration of the third embodiment. Reference numeral 701 denotes an upper actuator, numeral 702 denotes a lower actuator, numeral 703 denotes a movable sleeve, numeral 704 denotes a piston, numeral 705 denotes an upper housing, numeral 706 denotes a lower housing, numeral 707 denotes a contact seal, numeral 708 denotes a suction opening, numerals 709 and 710 denote bias springs, numeral 711 denotes a lower plate, numeral 712 denotes a discharge nozzle, numeral 713 denotes a fluid storing section, numeral 714 denotes a pump chamber, and numeral 715 denotes a non-contact seal section where a clearance between the member 703 having descended and the member 711 is arranged so as to be as small as possible.

[0213] Numeral 716 denotes a displacement sensor for detecting a position of the piston 104, and the sensor 716 is installed in an upper plate 717.

[0214] In the third embodiment, not an end surface but a side surface (the section 715) of the movable sleeve 703 is used for fluid seal of the pump chamber 714 with the movable sleeve 703.

[0215] Accordingly, a positioning accuracy of the movable sleeve 703 in axial direction may be rougher than in the case where the end surface is used. As a result, a displacement sensor for detecting a position of the movable sleeve 703 in axial direction can be omitted.

[0216] Hereinbelow, a fourth embodiment of the present invention will be described with reference to FIG. 9.

[0217] The fourth embodiment shows an example using not cylindrical but solid element for a first actuator that drives a piston. In this arrangement, the upper actuator can be mounted and removed as a unit.

[0218] Reference numerals 751 and 752 denote upper and lower actuators each composed of a laminated piezoelectric element, numeral 753 denotes a movable sleeve, numeral 754 denotes a piston, numeral 755 denotes an upper housing, numeral 756 denotes a lower housing, numeral 757 denotes a contact seal, numeral 758 denotes a suction opening, numeral 759 denotes an upper bias spring formed of a thinned portion of the piston 754, numeral 760 denotes a lower bias spring, numeral 761 denotes a lower plate, numeral 762 denotes a discharge nozzle, numeral 763 denotes a fluid storing section, numeral 764 denotes a pump chamber, numeral 765 denotes a non-contact seal section, numeral 766 denotes a displacement sensor, and numeral 767 denotes an upper plate.

[0219] A fixed side of the upper actuator 751 is attached to the upper plate 767. A movable tip end portion of the upper actuator 751 is provided with a flange 768, and an axial displacement of the piston 754 is detected from a position of a surface of the flange 768.

[0220] Numeral 769 denotes a small-diameter portion of the piston 754 that has been screwed into an end surface on discharge side of the piston 754, and numeral 770 denotes a small-diameter portion of cylinder that is provided in the movable sleeve 753 so as to fit with an outside diameter of the small-diameter portion 769 of the piston 754. In this arrangement, advantage could be effectively taken of a maximal stroke of the piston 754, with the selection of the outside diameter of the small-diameter portion 769 of the piston 754 in conformity with a maximal required discharge amount of the dispenser. The larger the displacement of the piston 754 is, the higher the accuracy in detecting the displacement, i.e., the accuracy in flow rate can be made.

[0221] The fourth embodiment exhibits the example using the laminated piezoelectric elements for both the actuators; however, giant magnetostrictive elements may be used.

[0222] Hereinbelow, a fifth embodiment of the present invention will be described.

[0223] The fifth embodiment is intended for achieving a long stroke of a piston and ensures continuous application (drawing) within a limited period of time.

[0224] In FIG. 10, reference numeral 801 denotes an upper actuator and numeral 802 denotes a lower actuator.

[0225] In order that the upper actuator 801 may have a long stroke, the fifth embodiment employs as the upper actuator 801 a cylindrical giant magnetostrictive element that normally has a stroke approximately twice that of a piezoelectric element having the same length. As the lower actuator 802, a piezoelectric element is employed as in the case of the aforementioned embodiments, because the lower actuator according to the specifications of a dispenser of the fifth embodiment may have a small stroke.

[0226] That is, the dispenser of the fifth embodiment has a hybrid actuator structure in which a giant magnetostrictive element and a piezoelectric element are combined.

[0227] Numeral 803 denotes a movable sleeve fixed to a free end side of the lower actuator 802, numeral 804 denotes a piston, numeral 805 denotes an upper housing, and numeral 806 denotes a fixing section for the elements. The piston 804 is accommodated so as to pierce center regions of the upper and lower actuators 801 and 802 and so as to be movable in axial direction.

[0228] Numeral 807 denotes a lower housing, numeral 808 denotes a contact seal installed between the movable sleeve 803 and the lower housing 807, numeral 809 denotes a suction opening, numeral 810 denotes a bias spring, numeral 811 denotes a lower plate, numeral 812 denotes a discharge nozzle, numeral 813 denotes a fluid storing section, numeral 814 denotes a pump chamber, and numeral 815 denotes a non-contact seal section where a clearance between the movable sleeve 803 having descended and the lower plate 811 is arranged so as to be as small as possible.

[0229] Numeral 816 denotes a displacement sensor for detecting a position of the piston 804. In the fifth embodiment, a displacement sensor for detecting a position of the movable sleeve 803 in axial direction is omitted. Numeral 817 denotes a bias spring for applying an axial bias load to the upper actuator (the giant magnetostrictive element) 801 and the spring 817 is installed between the piston 804 and the upper plate 821. The bias spring 817 continuously exerts an axial compressive stress on the giant magnetostrictive element and thereby cancel a defect of giant magnetostrictive elements, i.e., the vulnerability to tensile stress in the case that repeated stress is generated.

[0230] Numeral 818 denotes a giant magnetostrictive rod composed of a giant magnetostrictive element. A top portion of the giant magnetostrictive rod 818 is fastened to the piston 804 and a bottom portion of the rod 818 is fastened to the fixing section 806.

[0231] Numeral 819 denotes a magnetic field coil for applying a magnetic field in a longitudinal direction of the giant magnetostrictive rod 818. Numeral 820 denotes a permanent magnet for applying a bias magnetic field and the magnet 820 is accommodated in the upper housing 805. The permanent magnet 820 previously applies a magnetic field to the giant magnetostrictive rod 818 to increase an operating point of the magnetic field. This magnetic bias improves a linearity of the giant magnetostrictive element relative to an intensity of the magnetic field. The giant magnetostrictive actuator 801 is thus composed of the members 818, 819, and 820.

[0232] Giant magnetostrictive materials are alloys of rare earth elements and iron. For example, TbFe₂, DyFe₂, SmFe₂, and the like have been known and such materials have been put to practical use rapidly in recent years.

[0233] The arrangement of the fifth embodiment allows the piston 804 to have a sufficiently long stroke and thereby enables not only intermittent application but continuous application (drawing) in a limitedly short period of time. In drawing, the speed of the piston 804 is controlled on the basis of output from the displacement sensor 816. Keeping a fixed speed of the piston 804 permits lines of constant width to be drawn precisely.

[0234] In electro-magneto-strictive elements, it is known that the length of the stroke of one actuator having a shaft length exceeding a certain value is limited by internal stress. Where a plurality of actuators (giant magnetostrictive elements or piezoelectric elements) are connected in series in axial direction, therefore, the stroke of the piston can be further extended (not shown).

[0235] In the case that a displacement sensor of eddy current type, electrostatic type, or the like has a length measuring limit, the provision of a plurality of displacement sensors for detecting relative displacements between the actuators and of a sensor for detecting absolute position enables the calculation of an absolute position of the piston and thus resolves such a problem (not shown).

[0236] In the fifth embodiment, the permanent magnet 820 that applies a bias magnetic field for driving the giant magnetostrictive element (the upper actuator) is provided on the side of the outer circumference of the magnetic field coil 819. The outside diameter of the dispenser body can be further reduced providing that the permanent magnet 820 is omitted and the bias magnetic field is applied by the passage of a bias current through the magnetic field coil 819 (not shown).

[0237] Without such a permanent magnet for applying the bias magnetic field, a heat generation in the giant magnetostrictive element is apprehended. Where a common enclosure accommodating a plurality of dispensers is provided for the implementation of a multi-nozzle dispenser, a common cooling passage for cooling the magnetic field coils of the giant magnetostrictive elements can be formed (not shown).

[0238]FIG. 11 illustrates a sixth embodiment of the present invention in which a linear motor is employed for driving a piston. Though the stroke of a single electro-magneto-strictive element is limited to on the order of tens of micrometers, the stroke limit is eliminated by the substitution of a linear motor for such an electro-magneto-strictive element.

[0239] Linear motors are inferior to electro-magneto-strictive elements in responsibility and developed load but can be adapted to usage where rapid response, small diameter and compactness are not so required.

[0240] Reference numeral 851 denotes an upper actuator that is composed of radially magnetized permanent magnets 852 and an electromagnetic coil 853 having U, V, and W phases formed alternately.

[0241] Numeral 854 denotes a lower actuator composed of a laminated piezoelectric element, numeral 855 denotes a movable sleeve, numeral 856 denotes a piston, numeral 857 denotes an upper housing, numeral 858 denotes a lower housing, numeral 859 denotes a contact seal, numeral 860 denotes a suction opening, numeral 861 denotes a bias spring, numeral 863 denotes a lower plate, numeral 864 denotes a discharge nozzle, numeral 865 denotes a fluid storing section, numeral 866 denotes a pump chamber, numeral 867 denotes a non-contact seal section, numeral 868 denotes a leaf spring, numeral 869 denotes an upper plate, and numeral 870 denotes an electromagnetic coil having U, V, and W phases arranged alternately.

[0242] In the permanent magnets 852, cylindrical manganese-aluminum magnets magnetized in different directions are alternately stacked around a small-diameter portion 871 of the piston 856.

[0243] In order to increase an area of suction flow passage for highly viscous fluid, a linear motor may be used on the side of the lower actuator 854 that drives the movable sleeve 855.

[0244] Hereinbelow, a seventh embodiment of the present invention will be described referring to FIG. 12.

[0245] In the seventh embodiment, a thread groove pump is provided on an upstream side in a flow passage for a dispenser to which the present invention is adapted, for the purpose of ensuring a feeding pressure of fluid to be sucked and decreasing a viscosity of the fluid.

[0246] For Theological fluid used as carrier fluid, a viscosity of such fluid is determined by a temperature and a rate of shear the fluid undergoes. The seventh embodiment takes advantage of the fact that, by virtue of a thixotropic fluid behavior of Theological fluid, a certain period of time is normally required for such fluid once having its viscosity decreased to recover its original viscosity. That is, in a stage immediately before fluid is fed to the microminiature dispenser of the seventh embodiment, the fluid is initially subjected to shearing and the viscosity of the fluid is thereby decreased, with the rotation of the thread groove pump.

[0247] Only one thread groove pump having a large outside diameter is required for a plurality of microminiature dispensers and thus the pump does not interfere with a proper arrangement of a multi-nozzle fluid feeding system.

[0248] Reference numeral 900 denotes a thread groove pump as a master pump that is composed of a rotating shaft 901, a motor rotor 902, a motor stator 903, a thread groove 904 formed on the rotating shaft 901, a suction opening 905, a discharge opening 906, and a housing 907.

[0249] Numeral 908 denotes a microminiature dispenser that is a fluid feeding apparatus of the seventh embodiment. The thread groove pump 900 and the microminiature dispenser 908 communicate with each other through a feeding pipe 909.

[0250] A configuration of a fluid feeding system in which a plurality of microminiature dispensers of the seventh embodiment are arranged in parallel can be adapted, for example, to a process of applying fluorescent material or the like to a flat plate such as CRTs or PDPs or a process of applying electrode materials such as gold or silver or the like to PDPs. In this configuration, a common discharge passage on suction side for the material to be applied may be provided.

[0251] A discharge amount (and on-off switching) of each nozzle is highly flexible because each dispenser can be individually controlled. This feature ensures application with little loss of application material to a surface of a flat plate.

[0252] Otherwise, a multi-nozzle applying apparatus having a further simple configuration can be obtained where components of a plurality of dispensers are accommodated in a common housing (not shown).

[0253]FIG. 13 illustrate an eighth embodiment in which the present invention is adapted to a multi-nozzle applying unit having a piston with a rectangular cross section.

[0254] Reference numeral 550 denotes an upper actuator that is composed of laminated piezoelectric elements 551 and a piston plate 552. Numeral 553 denotes a lower actuator that is composed of a piezoelectric element 554 and a movable sleeve plate 555. Numeral 556 denotes a housing that accommodates the piston plate 552 and the movable sleeve plate 555. A plurality of discharge openings 558 are formed on a bottom surface 557 of the housing 556.

[0255] With the adaptation of the principles of the present invention, a fluid discharge apparatus further microminiaturized and thinned can be obtained. FIG. 14 illustrates a ninth embodiment in which a dispenser is configured with use of piezoelectric elements of bimorph type.

[0256] Reference numeral 950 denotes an upper actuator that is composed of piezoelectric ceramics 951 and 952, a metal shim 953, and a piston plate 954. Numeral 955 denotes a lower actuator that is composed of piezoelectric ceramics 956 and 957, a metal shim 958, and a movable sleeve plate 959. Numeral 960 denotes an upper fixing section interposed between the upper and lower actuators 950 and 955. A lower fixing section 971 is interposed between a lower plate 970 and the lower actuators 955. Numeral 972 denotes a suction opening formed along a bottom surface of the lower fixing section 971, and numeral 973 denotes a discharge opening formed on the lower plate 970.

[0257] In the description of the embodiments of the present invention, many examples in which an individual sensor is provided for detecting a position of a piezoelectric element have been presented.

[0258] Piezoelectric elements typified by piezoceramics and the like have both a piezoelectric effect of generating a voltage upon the application of a strain (deformation) and an inverse piezoelectric effect of deforming upon the application of a voltage. At present, studies are being conducted on “Self-Sensing Actuation (abbreviated as SSA)” for the purpose of performing simultaneously the sensing and actuating functions on strain (deformation) with simultaneous use of the piezoelectric effect and the inverse piezoelectric effect.

[0259] A strain voltage developed across a piezoelectric element is the sum of a component caused by a deformation of the element by an external force and a component caused by a deformation of the element by an applied voltage. A method has been therefore adopted in which a self-detected strain of a piezoelectric element is extracted with use of a bridge circuit.

[0260] This SSA method permits a fluid discharge apparatus of the present invention to have a further simple configuration (not shown).

[0261] The SSA method may be applied only to a movable sleeve, with the aid of the fact that a position detecting accuracy on the side of the movable sleeve may be lower than that on the side of a piston, for example, as described with reference to the third embodiment.

[0262] The idea of SSA and its adaptation to the present invention may be applied to giant magnetostrictive elements having both a magnetostrictive effect and an inverse magnetostrictive effect.

[0263] The above embodiments have been contrived, taking notice of the fact that a positive displacement pump can be constituted by the combination of two independent linear-motion devices in consideration of phases of those motions.

[0264] In a tenth embodiment that will be described below, a movable sleeve that is driven by the linear-motion device is further provided with a rotating function, and a function as a fluid feeding source is thereby integrated into one dispenser.

[0265] A structure of a dispenser shown in FIG. 15 is roughly composed of three driving sections and a pump section.

[0266] A first driving section is composed of a piezoelectric actuator and drives a piston. A second driving section is composed of a giant magnetostrictive element and drives a movable sleeve. The movable sleeve is further provided with a rotating function, through the use of a motor as a third driving section, with the aid of a characteristic of giant magnetostrictive elements to which power can be delivered without contact. Thread grooves are formed on surfaces of the movable sleeve and of a housing which undergo relative movements. The pump section includes both a device for transporting fluid to a discharge side with the rotation of the movable sleeve and a flow rate controlling device for controlling a discharge amount with linear motions of the movable sleeve and of the piston.

[0267] Hereinbelow, the three driving sections will be described first. The first driving section 400 is composed of the piezoelectric actuator 401 (details of its structure are omitted), the piston 402 that forms a center shaft, and a small-diameter portion 403 of the piston 402. The second driving section 404 is a linear actuator (axial driving device) composed of a giant magnetostrictive element. Reference numeral 405 denotes the movable sleeve driven by the giant magnetostrictive actuator, numeral 406 denotes a rotating sleeve that accommodates a front side of the movable sleeve 405, and numeral 407 denotes a housing that accommodates the actuator 404. Numeral 408 denotes a cylindrical giant magnetostrictive rod composed of giant magnetostrictive material. The giant magnetostrictive rod 408 sandwiched between biasing permanent magnets (A) 409 and (B) 410 in vertical direction is fixed between an upper rotating yoke 411 and the movable sleeve 405 that also serves as yoke material. Numeral 412 denotes a magnetic field coil for applying a magnetic field in a longitudinal direction of the giant magnetostrictive rod 408, and numeral 413 denotes a cylindrical yoke accommodated in the housing 407.

[0268] The biasing permanent magnets A and B previously apply a magnetic field to the giant magnetostrictive rod 408 to increase an operating point of the magnetic field, and form a closed-loop magnetic circuit linking the members 410→412→409→411→413→405→410 in the presented order, for controlling expansion and contraction of the giant magnetostrictive rod 408. That is, the members 405 and 408 to 413 constitute the giant magnetostrictive actuator 404 capable of controlling the axial expansion and contraction of the giant magnetostrictive rod with a current supplied for the magnetic field coil.

[0269] The piston 402 that is driven by the piezoelectric actuator 401 is provided so as to pierce the giant magnetostrictive rod 408 and the biasing permanent magnets (A) 409 and (B) 410. A top end of the upper rotating yoke 411 that accommodates the piston 402 so as to permit axial movement of the piston 402 is supported by a bearing 414 provided between the top end of the upper rotating yoke 411 and the housing 407.

[0270] A bias spring 415 for applying a mechanical and axial pressure to the giant magnetostrictive rod 408 is provided between the movable sleeve 405 and the rotating sleeve 406. With the above arrangement, the application of a current to the electromagnetic coil 412 of giant magnetostrictive element provides expansion or contraction of the giant magnetostrictive rod 408 proportional to the applied current.

[0271] Numeral 416 denotes a motor (the third driving section) that imparts a rotating motion to the upper rotating yoke 411, and a DC servomotor is employed in the embodiment. Numeral 417 denotes a motor rotor fixed to an outer surface of the upper rotating yoke 411. Numeral 418 denotes a motor stator, and numeral 419 denotes an upper housing that accommodates the motor stator 418. A rotating torque developed in the motor rotor 417 is transmitted through the upper rotating yoke 411, the magnet (A) 409, the giant magnetostrictive rod 408, and the magnet (B) to the movable sleeve 405.

[0272] A displacement sensor 420 for detecting a position of an end surface of the movable sleeve 405 is provided between the movable sleeve 405 and the housing 407 (fixed side). The rotating sleeve 406 that accommodates a part of the discharge side of the movable sleeve 405 is rotatably supported by a ball bearing 421 provided between the rotating sleeve 406 and the housing 407.

[0273] The piston 402, for which nonmagnetic material is used, exerts no influence upon the closed-loop magnetic circuit that controls the expansion and contraction of the giant magnetostrictive rod 408. With the above arrangement, a rotational motion of the movable sleeve 405 and a linear motion with a minute displacement of the sleeve 405 can be controlled simultaneously and independently. The piston 402 provided so as to extend through the movable sleeve 405 is capable of making a linear motion with a minute displacement, entirely independent of the motions of the movable sleeve 405.

[0274] In the embodiment, motive power for imparting a linear motion to the giant magnetostrictive rod 408 (and the movable sleeve 405) can be supplied from outside without contact, because the giant magnetostrictive element is employed for the linear actuator 404. That is, the actuator with the configuration is capable of moving the movable sleeve 405 axially with fast response, with the aid of a characteristic of electro-magneto-strictive elements having a frequency characteristic of a few megahertz, while the motor is running. In the embodiment, the third driving device is provided above the second driving device, and the first driving device is provided above the third driving device. The rotation of the piston 402 that is driven by the first driving device is not particularly required for the configuration of a positive displacement pump, and therefore the piezoelectric actuator can be employed for the piston.

[0275] Hereinbelow, the pump section 422 will be described. The pump section 422 is composed of members 421 to 428. Numeral 423 denotes radial groove formed on an outer surface of the movable sleeve 405 for feeding fluid forcefully to a discharge side, and numeral 424 denotes a cylinder that accommodates the movable sleeve 405. Between the movable sleeve 405 and the cylinder 424 is formed a pump chamber (a fluid transporting chamber) 425 in which a relative rotation of both the members provides a pump action. In the cylinder 424 is formed a suction bore 426 communicating with the pump chamber 425. Numeral 427 denotes a discharge nozzle attached to a lower end portion of the cylinder 424, and numeral 428 denotes a discharge flow passage formed in the discharge nozzle 427.

[0276] In the dispenser with the above configuration, the two linear actuators 400 and 404 may be operated synchronously in consideration of the phases of the motions, for example, and one of the linear actuators may be provided with a rotating function. In the dispenser, therefore, a pump configuration of positive displacement type can be employed as in the cases of the first to sixth embodiments, and fluid replenishing device (a thread groove pump) for feeding high-pressure fluid can be integrated into the positive displacement pump section with use of the rotating function. In the seventh embodiment that has been described already, the independent thread groove pump is provided on the upstream side of the dispenser having two direct-acting actuators. In the tenth embodiment, however, those two apparatus can be unified.

[0277] With the employment of a giant magnetostrictive actuator for the first driving section 400, the piston 402 could be caused to make a linear motion while being rotated in the same manner as the second driving section. This arrangement is advantageous in the reliability of sliding surfaces, because a relative speed between a movable sleeve (corresponding to the movable sleeve 405) and a piston (corresponding to the piston 402) might be zero even with a high-speed rotation of the movable sleeve (not shown).

[0278] In the above embodiment, a clearance for a thrust end surface on the discharge side of the movable sleeve 405 can be arbitrarily controlled with axial positioning function for the movable sleeve 405 while a constant rotation of the movable sleeve 405 is being kept. This function ensures a flow rate control in which powder and granular material is released and shut off without contact, as proposed in Japanese Patent Application No. 2000-188899 titled “Fluid Feeding Apparatus and Fluid Feeding Method”. That is, the formation of dynamic pressure seal on a surface that undergoes relative movements on the thrust end surface on the discharge side of the movable sleeve 405 makes it possible to shut off and release powder and granular material without mechanical contact in all the sections of the flow passage extending from a suction opening to the discharge nozzle.

[0279] For the formation of circuits or in the manufacturing processes of display panels such as PDP and CRT, for example, most of application materials used in those fields are powder and granular material containing minute particles. For example, conductive minute particles with a size on the order of 5 μm are encapsulated in adhesives used for resin sealing and the like of junctions in circuit formation. In fluorescent materials for CRT, particle sizes of the fluorescent substances are in the range from 7 to 9 μm.

[0280]FIG. 16 are figures of the principles of a pump section alone in an eleventh embodiment of the present invention. Reference numeral 450 denotes radial groove formed on an outer surface of a movable sleeve 451, numeral 452 denotes a center shaft, numeral 453 denotes a cylinder, numeral 454 denotes a suction bore, numeral 455 denotes a discharge nozzle, and numeral 456 denotes a discharge flow passage. Sealing thrust grooves 457 are formed on a surface that undergoes relative movements between an end surface of a discharge side of the movable sleeve 451 and the facing surface. An opening 458 of the discharge nozzle 455 is formed at a center portion of the surface facing the end surface on the discharge side. When a gap (δ in FIG. 16) between the end surface of the movable sleeve 451 and the facing surface is small, the sealing thrust grooves 457 function effectively and interrupt the discharge of fluid with pumping pressures developed in centrifugal directions (shown by arrows in FIG. 16). Provided that the shape, the number of revolutions, and the like of the sealing thrust grooves 457 are set so that an inequality δ>φd holds, wherein φd is a particle size of minute particles contained in powder and granular material, fluid can be shut off without the squeeze and breakage of the minute particles. When the movable sleeve 451 is raised so that the gap δ becomes sufficiently large, the pumping pressures caused by the sealing thrust grooves 457 are reduced and fluid is released. In summary, the above arrangement provides a positive displacement dispenser that has a function of releasing and shutting off powder and granular material without contact.

[0281] In the above embodiments, the present invention is adapted to a positive displacement pump. That is, displacement curves of a movable sleeve and a piston are established so that a pump chamber becomes a closed space cut off from suction side in the discharge stroke, with the aid of the fact that the movable sleeve (cylinder) and the piston can be driven and controlled independently. The structures of fluid discharge apparatus of the present invention can be adapted to uses other than a positive displacement pump, with modifications of displacement curves of a movable sleeve and a piston. For example, the present invention can be adapted to a flow control valve having an extremely excellent dynamic characteristic, with a movable sleeve and a piston driven generally in opposite phases.

[0282] Hereinbelow, effects of a twelfth embodiment will be described in which the present invention is adapted to a flow control valve of a dispenser for drawing. A general structure of the dispenser is much the same as that of the first embodiment (in FIG. 4), for example, and therefore its details will be omitted.

[0283]FIG. 17A illustrates an example of displacements X of a piston with respect to time t in a conventional flow control valve, and FIG. 17B is a model diagram of the valve. Reference numeral 250 denotes a piston, numeral 251 denotes a housing, numeral 252 denotes a discharge nozzle, and numeral 253 denotes a pump chamber.

[0284]FIG. 18A illustrates an example of displacements Xp of a piston and displacements Xs of a movable sleeve with respect to time t in the valve to which the present invention is adapted. FIG. 18B is a model diagram of the valve. Numeral 350 denotes a piston, numeral 351 denotes a movable sleeve, numeral 352 denotes a housing, numeral 353 denotes a discharge nozzle, and numeral 354 denotes a pump chamber. FIG. 19 illustrates “a characteristic of pressure P on an upstream side of the discharge nozzle with respect to time” in the valve to which the present invention is adapted, in comparison with that in a conventional valve. When a gap X between the piston 250 and the facing surface is increased for releasing fluid in the conventional valve shown in FIG. 17A, the pressure P on the upstream side (in the pump chamber 253) of the discharge nozzle substantially drops as shown by (a) in FIG. 19 with an increase in the capacity of the pump chamber 253. The development of negative pressure on the upstream side of the discharge nozzle may become a factor of “failure in drawing at a starting point of drawing” or “thinned drawn line”. When the gap X in FIG. 17B is decreased for shutting off fluid, the pressure P on the upstream side of the discharge nozzle rises reversely and substantially. The development of the high pressure is caused by the compression of fluid or an effect of dynamic pressure in hydrodynamic bearing, which is referred to as squeezing action. It has been observed that such a high pressure becomes a factor of “the development of liquid puddle” at an end point of drawing.

[0285] In the fluid control valve using a fluid discharge apparatus according to the present invention, the piston 350 and the movable sleeve 351 are driven in opposite phases, as shown in FIG. 18A. In this case, a change in the capacity of the pump chamber is canceled because the motions of the piston and the movable sleeve in axial direction are made in opposite phases. As a result, the development of negative pressure at a starting point of drawing and the development of high pressure at an end point of drawing are reduced as shown by (b) in FIG. 19, so that such troubles as “thinned drawn line” and “the development of liquid puddle” are eliminated. FIG. 26 is a graph showing a relation (an analyzed result of transient characteristics of discharge flow rate) between flow rate and time in cases where the displacements Xp of the piston 350 in FIG. 18B are 10, 20, and 30 μm while the displacement Xs of the movable sleeve 351 in FIG. 18B is 20 μm (constant) and where the radius of the movable sleeve 351 rs is 3 mm, the radius of the piston 350 rp is 1.5 mm, fluid viscosity η is 10,000 CPS. When the displacements Xp in FIG. 18B are 10, 20, and 30 μm, the flow rates are poor, acceptable, and sufficient. Even at the time when the displacement Xp of the piston 350 in FIG. 18B is at its lowest point (i.e., Xp=Xpmin), an influence the existence of the piston 350 exerts upon a flow passage resistance (i.e., flow rate) might be decreased with Xpmin set sufficiently large. Drivers for driving first and second actuators may be independently provided or the actuators may be driven in opposite phases by a single driver.

[0286] Even in a valve where the shapes of an end surface on discharge side of a piston or a movable sleeve and the facing surface are not flat, issues the conventional valves have can be removed by the adaptation of the present invention to the valve as clearly seen from the effects of the present invention. For example, the present invention can be adapted to a valve configured with an acutely convex surface of a tip end of a piston and with a concave facing surface. In such a valve, fluid is shut off by making the convex surface of the piston and the concave facing surface (on fixed side) adjacent to each other. In contrast to the twelfth embodiment, accordingly, fluid is shut off in the event that the movable sleeve has ascended and the piston has descended, while fluid is released on the reversed condition. In this case, an adequate setting is preferably made so that, at the time the displacement Xs of the movable sleeve is at its lowest point (i.e., Xs=Xsmin), Xsmin is sufficiently large. In any case, a fine adjustment of displacement curves of the piston and the movable sleeve is preferably performed according to applied processes and a characteristic of material to be applied, for the purpose of obtaining most desirable drawn lines.

[0287]FIG. 20 illustrates a thirteenth embodiment of the present invention. In the thirteenth embodiment, a valve is configured with use of only one electro-magneto-strictive actuator, taking notice of the fact that a piston and a movable sleeve (cylinder) may be driven in opposite phases where the present invention is employed for a fluid control valve. That is, both end portions of the one actuator that expands and contracts axially are supported by springs, and output of one end of the actuator is used as a first actuator for driving a piston while output of the other end of the actuator is used as a second actuator for driving a cylinder.

[0288] Reference numeral 350 denotes the actuator composed of a laminated cylindrical piezoelectric element, numeral 351 denotes the movable sleeve (the cylinder) fixed to the lower end portion of the actuator 350 and numeral 352 denotes the piston fixed to the upper end portion of the actuator 350. Numeral 353 denotes a housing that accommodates the actuator 350. The piston 352 is accommodated so as to be movable axially through a center region of the actuator 350. Numeral 354 denotes a lower plate fixed to a lower end portion of the housing 353, numeral 355 denotes a discharge nozzle, numeral 356 denotes a suction bore, and numeral 357 denotes an upper plate. Numerals 358 and 359 denote upper and lower bias springs for applying axial bias loads to the actuator (piezoelectric element) 350. The upper bias spring 358 is installed between the upper plate 357 and a piston plate 360 integral with the piston 352. The lower bias spring 359 is installed between the movable sleeve 351 and the housing 353. The bias springs 358 and 359 continuously exert an axial compressive stress on the electro-magnetostrictive element and thereby cancel a defect of electro-magneto-strictive elements, i.e., the vulnerability to tensile stress in the case that repeated stress is generated. Numeral 365 denotes a displacement sensor for detecting a position of the piston 352 in axial direction.

[0289] Where the stiffness of the upper bias spring 358 is sufficiently greater than that of the lower bias spring 359, the piston 352 does not move but only the movable sleeve 351 moves. Conversely, where the stiffness of the lower bias spring 359 is sufficiently greater than that of the upper bias spring 358, the movable sleeve 351 does not move but only the piston 352 moves. Accordingly, an adequate setting of the stiffnesses of both the springs 358 and 359 allows an arbitrary selection of displacements of the movable sleeve 351 and the piston 352 both of which are driven in phases opposite to each other. Herein, an output end portion 361 of the actuator 350 that drives the piston 352 is referred to as a first actuator and an output end portion 362 of the actuator 350 that drives the movable sleeve 351 is referred to as a second actuator. The fluid control valve of the embodiment requires only one set of actuator and its driving source and therefore allows the whole apparatus to be extremely compact, simple, and inexpensive.

[0290] Multi-head application can be achieved with the provision of a high-pressure feeding source of fluid on an upstream side of a plurality of the fluid control valves in the same manner as shown in the seventh embodiment, for example, as shown in FIG. 25 where one thread groove pump 900 connected to fifteen microminiature dispensers 908 is used for application of a display 1000 such as a CRT. This multi-head applying apparatus of FIG. 25 can be used, for example, for an application process of a display panel that requires not less than one thousand lines of fluorescent material to be drawn. For example, first, when a multi-head applying apparatus for red fluorescent material is prepared as shown in FIG. 25 and the relative movements between the piston and the housing and between the cylinder and the housing are respectively produced by the first and the second actuators, the fluid that is red fluorescent material is sucked into the pump chamber. Thereafter the pump chamber and the passage are blocked on the suction side by driving the second actuator, then, the fluid is compressed in the pump chamber by driving the first actuator and the fluid, and thereby the fluid is lineally discharged into outside to apply the fluid as 1000 red fluorescent material lines on a panel of a CRT. Next, when a multi-head applying apparatus for green fluorescent material is prepared as shown in FIG. 25 and the relative movements between the piston and the housing and between the cylinder and the housing are respectively produced by the first and the second actuators, the fluid that is green fluorescent material is sucked into the pump chamber. Thereafter the pump chamber and the passage are blocked on the suction side by driving the second actuator, then, the fluid is compressed in the pump chamber by driving the first actuator and the fluid, and thereby the fluid is lineally discharged into outside to apply the fluid as 1000 green fluorescent material lines on the panel of the CRT. Next, when a multi-head applying apparatus for blue fluorescent material is prepared as shown in FIG. 25 and the relative movements between the piston and the housing and between the cylinder and the housing are respectively produced by the first and the second actuators, the fluid that is blue fluorescent material is sucked into the pump chamber. Thereafter the pump chamber and the passage are blocked on the suction side by driving the second actuator, then, the fluid is compressed in the pump chamber by driving the first actuator and the fluid, and thereby the fluid is lineally discharged into outside to apply the fluid as 1000 blue fluorescent material lines on the panel of the CRT. The fluid control valve may have an outside diameter of a pencil size and thus the number of the heads can be sufficiently large. As a result, an applying apparatus that achieves high production tact is obtained. Besides, an extremely compact flow control valve can be obtained with use of piezoelectric elements of bimorph type, thin-film piezo elements, or the like, as shown in the ninth embodiment.

[0291] Any of the first to eleventh embodiments adapted to a positive displacement pump may be adapted to a flow control valve. In this case, a fluid feeding source for the flow control valve may be a pump of any form, and a method may be employed in which fluid is fed to a pump chamber with the aid of air pressure.

[0292] As described above, the present invention can be adapted to various uses with an adequate selection of a phase relation between Xp(t) and Xs(t) where Xp(t) is a displacement characteristic of a piston driven by a first actuator and Xs(t) is a displacement characteristic of a cylinder driven by a second actuator. In summary,

[0293] (1) The present invention can be adapted to a positive displacement pump, provided that a displacement Xs(t) of a cylinder (movable sleeve) is set so that a passage on suction side is blocked after the suction of fluid into a pump chamber and thereafter a displacement Xp(t) of a piston is made to approach zero.

[0294] (2) The present invention can be adapted to a fluid control valve, provided that driving operations are carried out so that a displacement Xp(t) of a piston and a displacement Xs(t) of a cylinder have opposite phases. The present invention can be adapted to a high-speed intermittent dispenser using a squeezing action, provided that driving operations are carried out so that a displacement Xp(t) of a piston and a displacement Xs(t) of a cylinder are the same phase as each other or provided that only one of the piston and the cylinder is driven.

[0295] Types of actuators used in the present invention are not limited to the aforementioned electro-magneto-strictive type, magnetic type, and the like. For example, an apparatus body can be substantially miniaturized, providing that electrostatic actuator(s) having a large developed load relative to a given volume are employed as both or either of first and second actuators with the adaptation of the principles of the present invention. That is, a micropump of positive displacement type or a flow control valve having a function of compensating for dynamic characteristic can be obtained for the first time in the categories of micromachine and mini-machine (not shown).

[0296] The following effects are achieved by the fluid feeding apparatus employing the present invention.

[0297] 1. A dispenser for an ultra-minute and fixed amount can be obtained that has an extremely small diameter and a microminiature and simple structure.

[0298] 2. An applying system can be obtained that is easily adapted so as to have a multi-nozzle configuration and allows a flow rate in each nozzle to be controlled independently by virtues of the above characteristics.

[0299] 3. Fluid having a high viscosity can be discharged with high accuracy.

[0300] 4. Intermittent application can be performed at an extremely high speed.

[0301] 5. A high reliability is assured by the absence of performance degradation that might be caused by sliding wear and the like.

[0302] 6. Besides, a pump to which the present invention is adapted may also have the following characteristics because the form of the pump can be of positive displacement type.

[0303] (1) The discharge amount is variable with stroke control.

[0304] (2) Thread-forming, fluid-dripping, and the like can be easily prevented.

[0305] (3) Continuous application can be performed within a limited time period with high accuracy.

[0306] (4) The discharge amount is independent of a change in environmental temperature (a change in viscosity) and of a gap between a nozzle and a surface for application.

[0307] (5) Powder and granular material mixed with minute particulate can be handled because non-contact piston parts can be provided.

[0308] 7. For example, a dispenser capable of drawing with high accuracy at the beginning and ending of application is obtained, with use of the apparatus as a flow control valve.

[0309] Although the present invention has been fully described in connection with the preferred embodiments thereof with reference to the accompanying drawings, it is to be noted that various changes and modifications are apparent to those skilled in the art. Such changes and modifications are to be understood as included within the scope of the present invention as defined by the appended claims unless they depart therefrom. 

What is claimed is:
 1. A fluid discharge apparatus comprising: a first actuator for moving a piston and a housing relatively; a cylinder which accommodates at least a part of the piston and has a space extending therethrough in an axial direction thereof; and a second actuator for moving the cylinder and the housing relatively, wherein a pump chamber is defined by the piston, the cylinder, and the housing, and a fluid suction opening and a fluid discharge opening are provided for communications between the pump chamber and outside thereof.
 2. A fluid discharge apparatus as claimed in claim 1, wherein the first actuator is installed on a fixing section and moves in an axial direction and the second actuator is installed on an opposite surface of the fixing section and moves in the same axial direction as the first actuator moves.
 3. A fluid discharge apparatus as claimed in claim 1, wherein a side of the piston facing the pump chamber has an open end and a discharge opening is formed on a surface which undergoes relative movements between an end surface of the piston facing the pump chamber and a surface facing the end surface.
 4. A fluid discharge apparatus as claimed in claim 1, wherein the pump chamber has a capacity changing with the relative movements between the piston and the housing.
 5. A fluid discharge apparatus as claimed in claim 1, wherein the cylinder and the housing are configured so that a flow passage resistance of fluid traveling between the pump chamber and the outside changes with relative movements between the cylinder and the housing.
 6. A fluid discharge apparatus as claimed in claim 1, wherein an end section of the piston facing the pump chamber and an internal surface section of the cylinder accommodating the end section of the piston have reduced diameters and are attachable and detachable.
 7. A fluid discharge apparatus as claimed in claim 1, wherein the first actuator and/or the second actuator are actuators of electro-magneto-strictive type.
 8. A fluid discharge apparatus as claimed in claim 7, wherein the actuator of electro-magneto-strictive type comprises a piezoelectric element or a giant magnetostrictive element.
 9. A fluid discharge apparatus as claimed in claim 8, wherein the element of electro-magneto-strictive type and a control circuit for the element have both functions of an actuator and of a displacement sensor.
 10. A fluid discharge apparatus as claimed in claim 1, wherein relative axial positions of the piston and of the housing are controlled on the basis of output from a displacement sensor for detecting the relative axial positions.
 11. A fluid discharge apparatus as claimed in claim 1, wherein a displacement sensor comprising a hollow rotor for position detection and a stator for position detection is used for detecting relative axial positions of the cylinder and of the housing.
 12. A fluid discharge apparatus as claimed in claim 11, wherein the displacement sensor is of differential transformer type.
 13. A fluid discharge apparatus as claimed in claim 1, wherein an axial length of the first actuator is larger than an axial length of the second actuator.
 14. A fluid discharge apparatus as claimed in claim 13, wherein the first actuator comprises a plurality of actuators arranged along the axial direction.
 15. A fluid discharge apparatus as claimed in claim 1, having a hybrid actuator structure in which a giant magnetostrictive element is employed for any one of the first actuator and the second actuator and a piezoelectric element is employed for the other.
 16. A fluid discharge apparatus as claimed in claim 1, wherein a linear motor or linear motors are employed for any one or both of the first actuator and the second actuator.
 17. A fluid discharge apparatus as claimed in claim 1, having a linear motor comprising a rod in which radially magnetized cylindrical or solid permanent magnets are laminated and an electromagnetic coil which surrounds an outer circumference of the rod.
 18. A fluid discharge apparatus as claimed in claim 1, wherein the piston has a shape of a thin plate and a rectangular cross section.
 19. A fluid discharge apparatus as claimed in claim 1, wherein the first actuator and/or the second actuator are laminated piezoelectric elements each having a rectangular cross section.
 20. A fluid discharge system comprising: an enclosure section which accommodates a plurality of fluid discharge apparatus as claimed in claim 1; and a fluid feeder for feeding the enclosure section with fluid.
 21. A fluid discharge system as claimed in claim 20, wherein the enclosure section is configured so that a common fluid feeding passage communicates with a plurality of pump chambers of the plurality of fluid discharge apparatus.
 22. A fluid discharge system as claimed in claim 20, wherein giant magnetostrictive elements from which permanent magnets are omitted are employed for the first actuator and/or the second actuator and a common cooling passage for cooling magnetic field coils is formed in the enclosure section.
 23. A fluid discharge apparatus as claimed in claim 1, wherein at least one of the first actuator and the second actuator comprise a thin-film piezo element.
 24. A fluid discharge apparatus wherein at least one of a first actuator and a second actuator has a function of traveling or expanding and contracting with aid of exterior, electromagnetic and non-contact power supplying device.
 25. A fluid discharge apparatus as claimed in claim 1, comprising a third actuator for producing relative rotation between the cylinder and the housing and a pump device for feeding fluid forcefully to a discharge side which is formed on a surface that undergoes relative movements between the cylinder and the housing.
 26. A fluid discharge apparatus as claimed in claim 25, wherein the pump device is thread groove pump.
 27. A fluid discharge apparatus as claimed in claim 25, wherein the first actuator is a giant magnetostrictive element.
 28. A fluid discharge apparatus as claimed in claim 1, wherein the cylinder and the piston are driven in generally opposite phases.
 29. A fluid discharge apparatus as claimed in claim 1, wherein both end portions of one actuator that expands and contracts axially are supported by springs, output of one end of the actuator is used as the first actuator and output of the other end of the actuator is used as the second actuator.
 30. A fluid discharge apparatus as claimed in claim 1, wherein a high-pressure developing source for fluid is provided on an upstream side of the fluid discharge apparatus and the cylinder and the piston in the fluid discharge apparatus as a fluid control valve are driven in generally opposite phases so as to release or shut off the fluid.
 31. A fluid discharge method comprising: producing by a first and a second actuators relative movements between a piston and a housing and between a cylinder and the housing, respectively, to open a pump chamber defined by the piston, the cylinder, and the housing, thereby sucking fluid into the pump chamber; thereafter blocking the pump chamber and a passage on a suction side by driving the second actuator; and thereafter compressing the fluid in the pump chamber by driving the first actuator and the fluid and thereby discharging the fluid into outside.
 32. A fluid discharge method as claimed in claim 31, wherein in producing by the first and the second actuators the relative movements, the first actuator moves in an axial direction and the second actuator moves in the same axial direction as the first actuator moves.
 33. A fluid discharge method as claimed in claim 31, wherein in producing by the first and the second actuators the relative movements, a capacity of the pump chamber is changed with the relative movements between the piston and the housing.
 34. A fluid discharge method as claimed in claim 31, wherein in producing by the first and the second actuators the relative movements, relative rotation between the cylinder and the housing is produced to feed the fluid forcefully to a discharge side formed on a surface that undergoes the relative movements between the cylinder and the housing.
 35. A fluid discharge method as claimed in claim 31, wherein the relative movements are produced by the first and the second actuators by axially expanding and contracting both end portions of one actuator supported by springs to use as the first actuator output of one end of the actuator and use as the second actuator output of the other end of the actuator.
 36. A fluid discharge method as claimed in claim 31, wherein the cylinder and the piston as a fluid control valve are driven in generally opposite phases so as to cancel a change in a capacity of the pump chamber to release or shut off the fluid.
 37. A fluid discharge method as claimed in claim 31, wherein in producing by the first and the second actuators the relative movements between the piston and the housing and between the cylinder and the housing, respectively, the fluid that is red fluorescent material is sucked into the pump chamber; after blocking the pump chamber and the passage on the suction side by driving the second actuator, in compressing the fluid in the pump chamber by driving the first actuator and the fluid, thereby the fluid is lineally discharged into outside to apply the fluid on a panel of a CRT; then in producing again by the first and the second actuators the relative movements between the piston and the housing and between the cylinder and the housing, respectively, the fluid that is green fluorescent material is sucked into the pump chamber; after blocking the pump chamber and the passage on the suction side by driving the second actuator, in compressing the fluid in the pump chamber by driving the first actuator and the fluid, thereby the fluid is lineally discharged into outside to apply the fluid on the panel of the CRT; then in producing again by the first and the second actuators the relative movements between the piston and the housing and between the cylinder and the housing, respectively, the fluid that is blue fluorescent material is sucked into the pump chamber; and after blocking the pump chamber and the passage on the suction side by driving the second actuator, in compressing the fluid in the pump chamber by driving the first actuator and the fluid, thereby the fluid is lineally discharged into outside to apply the fluid on the panel of the CRT.
 38. A fluid discharge method as claimed in claim 31, wherein the fluid is fluorescent material or electrode material.
 39. A fluid discharge method as claimed in claim 31, wherein the fluid is fluorescent material in a case where the fluid is discharged onto a CRT.
 40. A fluid discharge method as claimed in claim 31, wherein the fluid is electrode material in a case where the fluid is discharged onto a PDP.
 41. A fluid discharge apparatus as claimed in claim 1, wherein the fluid is fluorescent material or electrode material.
 42. A fluid discharge apparatus as claimed in claim 1, wherein the fluid is fluorescent material in a case where the fluid is discharged onto a CRT.
 43. A fluid discharge apparatus as claimed in claim 1, wherein the fluid is electrode material in a case where the fluid is discharged onto a PDP. 